Semiconductor arrangement having capacitive structure and manufacture thereof

ABSTRACT

A semiconductor manufacturing process is used to develop capacitors in compact areas such as at or near the interconnect level. According to one example embodiment, a substrate having a first and second conductor is separated by a dielectric, once the dielectric is removed a trench is formed, and a first material including silicon nitride is deposited over the substrate so that it covers the trench. A second material, including metal, is then deposited over the first material, covering it and the first and second conductors. CMP is then used to remove the metal over the field and isolate the filled metal from adjacent metals causing the silicon nitride to act as a natural CMP etch-stopper and protecting other areas of the interconnect from damage by the CMP.

FIELD OF THE INVENTION

This invention relates to semiconductor devices and their manufactureand, more particularly, to such devices incorporating, and processes fordeveloping, capacitors at or near the interconnect level.

BACKGROUND OF THE INVENTION

The electronics industry continues to rely upon advances insemiconductor technology to realize higher-functioning devices in morecompact areas. For many applications, realizing higher-functioningdevices requires integrating a large number of electronic devices into asingle silicon wafer. As the number of electronic devices per given areaof the silicon wafer increases, the manufacturing process becomes moredifficult.

A large variety of semiconductor devices have been manufactured havingvarious applications in numerous disciplines. Such silicon-basedsemiconductor devices often include metal-oxide-semiconductor (MOS)transistors, such as p-channel MOS (PMOS), n-channel MOS (NMOS) andcomplimentary MOS (CMOS) transistors, bipolar transistors, and BiCMOStransistors.

Each of these semiconductor devices generally includes a semiconductorsubstrate on which a number of active and passive devices are formed.The particular structure of a given active device can vary betweendevice types. For example, in MOS transistors, an active devicegenerally includes source and drain regions and a gate electrode thatmodulates current between the source and drain regions. Passive on-chipdevices, such as capacitors and resistors, are typically strategicallyplaced to interact with the active devices.

One important step in the manufacture of such devices is the formationof capacitors as a closely integrated part of the semiconductor device.Passive on-chip capacitors are desirable components four analog ormixed-signal circuit designs. In a CMOS based technology, capacitors aregenerally made using the MOS gate itself, with poly and substrate actingas the two electrodes and gate oxide as the dielectric.

There are at least two drawbacks of such gate capacitors. First, gatecapacitors directly use the silicon real estate and thus increase thechip size and cost. Second, gate capacitors are not inherently passive,since the capacitance is dependent on the gate voltage the capacitancevalue may vary. Alternatively, capacitors could be made at theinterconnect levels, where there often are spaces to accommodate extraelements without increasing the silicon area. Capacitors made of metalpieces would be truly passive with constant values. One possiblestructure of interconnect capacitance consists of two parallel metallines with dielectric between them. A problem with this approach is thatthe spacing between two metal lines generally has a minimum valuedefined by the process technology. Disadvantageous to the relativelysmall chip area, without reducing the inter-metal spacing, long metallines have been typically required to achieve sufficient capacitancevalues.

Accordingly, there is a need for semiconductor structures, andmanufacturing processes therefor, that overcome the aforementioneddisadvantages of the prior art.

SUMMARY

According to various aspects of the present invention, embodimentsthereof are exemplified in the form of semiconductor manufacturingprocesses for developing capacitors in compact areas such as at or nearthe interconnect level. One specific implementation directed to suchmanufacture begins with a substrate having first and second conductorsseparated by a temporary material. The material that separates the firstand second conductors is removed and a trench therebetween is formed. Afirst material, having a relatively high dielectric constant (e.g.,higher than about 7.0 ) is deposited over the substrate so that firstmaterial covers the trench and the first and second conductors adjacentto the trench. A second material, including metal, is then depositedover the first material so that it covers the first material above thetrench and the first and second conductors adjacent to the trench. Thesecond material is removed, for example, by a selective etch process,and, while removing the second material, the first material is detectedfor termination of the removal or etching of the second material.

Another related process, also according to the present invention,includes: a starting structure prepared in a Damascene processconsisting of metal lines with oxide filling the gaps. A commonly-usednew planarization process in semiconductor device manufacturing ischemical-mechanical polishing, or CMP. CMP is useful in theplanarization of silicon wafers and of VLSI circuits between differentmanufacturing processes. CMP is used in this application to remove metalover the field. A selective etch process is then performed to remove theoxide deposited between the metal lines over the area where thecapacitor is to be made. Photolithography, a process involving thephotographic transfer of a pattern to a surface for etching, masks alloutside areas to prevent the circuit from being damaged. A dielectric ofsilicon nitride is then deposited on the surface, forming a thin nitridelayer on the sidewall of the metal lines. Silicon nitride has a highdielectric constant “k” (about 7.5) enabling capacitor formation.Blanket metal deposition follows the deposit of the dielectric and fillsthe newly formed gaps. A CMP process is again used to remove metal overthe field. Because silicon nitride acts as a natural CMP etch-stopper,the other areas of the interconnects are protected by possible damagedone during this process.

In another example embodiment, the capacitors are made more efficient bycross-coupling the two finger structures where both sides of a metalline are utilized for capacitance. For example, in a specificimplementation, this approach includes manufacturing a semiconductordevice by providing a substrate having first and second metal conductorsseparated by a dielectric and arranged so that they are cross-coupled,with each of the first and second metal conductors including first andsecond surface sides facing the dielectric. Subsequent steps include:removing the dielectric that separates the first and second metalconductors and forming a trench therebetween; depositing a firstmaterial (such as silicon nitride), having a dielectic constant at leastabout 7.5, over the substrate so that first material covers the trenchand the first and second metal conductors adjacent to the trench;depositing a second material, including metal, over the first materialso that the second material covers the first material above the trenchand the first and second metal conductors adjacent to the trench;removing the second material; and, while removing the second material,detecting the first material for terminating the removal of the secondmaterial.

In a more specific implementation, the first and second metal conductorsform outside terminals of a two-capacitor structure, with the othermaterial forming a common terminal interconnecting the two capacitors.The first material dielectrically separates the adjacent conductiveareas that are used as the terminals.

In another more specific implementation, the first and second metalconductors form one terminal of a two-terminal capacitor structure, withthe other material forming the other of the two terminals. The twoterminals are dielectrically separated by the first material.

In one particular implementation found to be especially useful for atypical 0.20 micron technology, the first material is silicon nitrideand removing the second material includes a selective etch process.

The above summary is not intended to provide an overview of all aspectsof the present invention. Other aspects of the present invention areexemplified and described in connection with the detailed description.

BRIEF DESCRIPTION OF THE DRAWINGS

Various aspects and advantages of the present invention will becomeapparent upon reading the following detailed description of variousembodiments and upon reference to the drawings in which:

FIGS. 1a through 1 e illustrate a process for forming a semiconductorstructure, shown from a cross-sectional view, according to one exampleembodiment of the present invention; and

FIG. 2 illustrates an example embodiment of a cross-coupled metalcapacitor, shown from a top-down view, according to the presentinvention.

While the invention is amenable to various modifications and alternativeforms, specifics thereof have been shown by way of example in thedrawings and will be described in detail. It should be understood,however, that the intention is not to limit the invention to anyparticular embodiment described. On the contrary, the invention is tocover all modifications, equivalents, and alternatives falling withinthe spirit and scope of the invention as defined by the appended claims.

DETAILED DESCRIPTION

The present invention may be applied to a variety of semiconductorstructures involving the formation of capacitors in compact integratedcircuit areas. The present invention has been found to be particularlyadvantageous for use in connection with forming capacitors havingrelatively high capacitance values in compact integrated circuit areas,such as at or near the interconnect level. While the present inventionis not so limited, various aspects of the invention are best appreciatedthrough a discussion of application examples in such an environment.

According to one example embodiment of the present invention, a processof fabricating a semiconductor structure implements a capacitorstructure using a dielectric between regions defining first and secondconductors, and implementing one of the terminals of the capacitorstructure as a metal-filled trench. Initially, a temporary material(such as a conductor or a dielectric) separates the regionscorresponding to the first and second conductors. The temporary materialis then removed, e.g., via etching or ion bombardment, to form a trench.A dielectric material having a relatively high dielectric constant isthen deposited over the substrate so that the dielectric material coversthe trench and the first and second conductors adjacent to the trench. Aconductive material is then deposited to cover the dielectric materialin the trench and over the first and second conductors adjacent to thetrench. The conductive material fills the trench along a lining or layerof the dielectric material. A substrate removal process, for example, aselective or metal etch process, is then used to remove the conductivematerial over the trench until the dielectric material having arelatively high dielectric constant is detected on the surface of thestructure.

The resultant structure is a capacitor structure defined by theterminals (conductive material) on either side of the high-dielectricmaterial and in the trench. This high-dielectric material has an insidesurface defining the bottom and sides of the trench. In one morespecific example embodiment, the first and second conductors facing theoutside surface of the trench are electrically interconnected to defineone of the terminals, and the other terminal is defined by theconductive material filling the trench. In another more specific exampleembodiment, the first and second conductors facing the outside surfaceof the trench are electrically isolated from one another, and thecapacitor structure includes two serially-connected capacitors. Each ofthe two serially-connected capacitors shares a common center terminaldefined by the conductive material filling the trench, and the otherterminal of each of the two serially-connected capacitors isrespectively defined by one of the first and second conductors facingthe outside surface of the trench.

Advantageously, in each of these more specific embodiments, the insidesurface of the dielectric material has an actual length defined alongthe bottom and sides of the trench, and an effective length that is notlonger than the width of the trench.

Turning now to the figures, FIGS. 1a-1 e illustrate an example process,according to the present invention, for forming a capacitor structurehaving one terminal defined by a trench-filled conductor, a materialhaving a high-dielectric constant, and another terminal defined by apair of conductors. FIG. 1a illustrates the pair of conductors includingfirst conductor 10 and second conductor 12, with an insulative ordielectric material 14 separating the pair of conductors. Theillustrated substrate can include other metal lines 16 (e.g., aninterconnect line) with insulative or dielectric material 18 filling theareas between such lines as shown in FIG. 1a.

In the example process of FIGS. 1a-1 e, the illustrated structure isplanarized to expose the metal lines at a surface 20. Such planarizationcan be implemented by a conventional polishing technique, such as bychemical-mechanical polishing (CMP). A planarized structure as shown inFIG. 1a is naturally prepared in a Damascene process in which metallines are patterned by laying metal in oxide trenches and CMP to removemetal over the field.

Next, the dielectric material 14 between metal conductors (or “lines” asthe application may require) 10 and 12 is removed to form a trench inthe area where the desired capacitor structure is to be made. Trenchingthe structure, particularly the dielectric material 14, can beaccomplished in a number of different ways. Trenches are typicallyformed in the silicon through the use of well-known photolithography andetching techniques. In an example implementation consistent with theexample process depicted by FIGS. 1a- 1 e, a conventional selective etchprocess is used to remove the oxide 14 between metal lines 10 and 12(FIG. 1b). The areas outside the oxide 14 is masked off byphotolithography, and the selective etch process, by definition, isselective to etch only the oxide. The resultant trench is depicted as 24in FIG. 1b.

Other etching processes can also be used. However, in advanced,deep-submicron manufacturing processes, it is important to terminate theetching at a precise depth, and this is readily achieved using aconventional endpoint detection system. When etching one film on top ofa different film (such as the oxide on top of an underlying materialthat is not shown in the FIGS. 1a-1 e), the amount of light for oneparticular wavelength emitted by the plasma changes as the upper film isbeing etched away. This wavelength of light corresponds to one of theproducts during the plasma etch process. The endpoint detection systemis used to detect the changes of that one particular wavelength of thelight during the plasma etching process. There are two conditions thatapply to such an endpoint detection system: the film on the top to beetched has finite thickness relative to the etchrate of the film; andthere is another film of a different type underneath the film to beetched. Therefore, as the top film is being etched away, the productschange and this, in turn, changes the amount of the light emitted bythose products. As a result, the endpoint detection system can pick upthe changes in the intensity of the light and terminate the etchingprocess when the top film is completely etched away.

In an alternative embodiment of the present invention, the structure ofFIG. 1a is modified in that the dielectric material 14 is replaced by ametal material, and a trench is provided therein using a conventionalmetal-etch process, e.g., with a timed endpoint termination that stopsshort of etching the metal material completely away by leaving a metallayer defining the bottom of the trench. In an example implementation,the metal layer has a thickness that is a few-to-several percentagepoints of its original thickness after planarization. This metal layerdefining the bottom of the trench is used to form an electricalinterconnection of the metal conductors 10 and 12.

Another alternative approach to interconnecting the metal conductors 10and 12, also according to the present invention, does not involveproviding this metal region and then etching to form a metal layerdefining the bottom of the trench. Rather, the structure of FIG. 1a isformed over an underlying layer that includes a conductorinterconnecting the metal conductors 10 and 12. This underlying layerdefines the bottom of the trench and is used to form an electricalinterconnection of the metal conductors 10 and 12.

The resultant structure of these two alternative approaches differs fromthe resultant structure depicted by the approach illustrated inconnection with FIGS. 1a-1 e. In each of these two alternativeapproaches, the structure being formed is a single capacitor having itsterminals as the conductive material on either side of the trench. Theresultant structure depicted by the approach illustrated in connectionwith FIGS. 1a-1 e has the first and second conductors facing the outsidesurface of the trench as two of three electrically isolated terminalsarranged to form two serially-connected capacitors.

For each of the above-discussed alternative embodiments, once the trenchis defined, next in the example process and as depicted by FIG. 1c,silicon nitride is deposited on the surface of the structure to form athin nitride layer on the sidewall of metal lines. This thin nitridelayer (or liner) is depicted as layer 28 in FIG. 1c.

As shown in FIG. 1d, blanket deposition of metal 32 follows to fill thenewly formed trench 24.

For an alternative application where multiple trenches are being formedin place of removed oxide in the other positions (for example, in thestructure of FIG. 1a), silicon nitride is deposited on the surface toform a thin nitride layer on the sidewall of the metal lines and witheach trench that is formed. The subsequent blanket metal deposition thenfills each of the newly formed trenches.

CMP is then used to remove the metal over the field and isolate thefilled metal from adjacent metals (FIG. 1e). In this step, theunderlying silicon nitride naturally acts as a CMP etch-stopper, so thatother areas of the interconnects are protected from damage by CMP.

While another type of dielectric can be chosen, in the above exampleimplementation silicon nitride is chosen as the dielectric because ofits high dielectric constant (“k” being about 7.5) which enables compactcapacitor formation. The metal capacitors can be compared with gatecapacitors in terms of area usage. For the same capacitance value, itcan be shown that the metal length is only half the gate width, i.e.,L_(m) approximately 0.5W_(g), for a typical sub-micron technology withthe following conditions: oxide dielectric constant k is equal to 4.0,the gate oxide thickness Tox is equal to 40 Å, the gate length Lg is 0.2μm, the silicon nitride thickness T_(SiN) is equal to 100 Å, and themetal thickness Tm is equal to 0.5 μm.

In an alternative implement ation, also according to the presentinvention, the capacitors are made more efficient by cross-couplingfirst and second conductors as two finger structures where both sides ofa metal line are utilized for capacitance. For example, in a specificimplementation, this approach includes manufacturing a semiconductordevice by providing a substrate having first and second metal conductors separated by a dielectric and arranged so that they are cross-coupled,with each of the first and second metal conductors including first andsecond surface sides facing the dielectric. Subsequent steps include:removing the dielectric that separates the first and second metalconductors and forming a trench therebetween; depositing a firstmaterial (such as silicon nitride), having a dialectic constant of atleast about 7.5, over the substrate so that first material covers thetrench and the first and second metal conductors adjacent to the trench;depositing a second material, including metal, over the first materialso that the second material covers the first material above the trenchand the first and second metal conductors adjacent to the trench;removing the second material; and, while removing the second material,detecting the first material for terminating the removal of the secondmaterial.

FIG. 2 shows a resultant capacitor structure with terminals “a” and “b”on either side of such a structure including two cross-coupled metalstructures 44 and 46 separated by a high-dielectric material 48. In thisillustrated example, the cross-coupled metal structure 44 includes sevenfingers, and the cross-coupled metal structure 46 includes six fingers.It will be appreciated that the number of fingers for each of thesecross-coupled metal structures can vary.

The various embodiments described above are provided by way ofillustration only and are not intended to limit the invention. Thoseskilled in the art will readily recognize various modifications andchanges that may be made to the present invention without strictlyfollowing the example embodiments and applications illustrated anddescribed herein. The scope of the present invention is set forth in thefollowing claims.

What is claimed is:
 1. A method of manufacturing a semiconductor devicehaving a capacitive structure including a substrate having a firstconductor and a second conductor, comprising: removing a temporarymaterial that separates the first and second conductors and forming atrench therebetween; depositing a first material, having a dielectricconstant at least about 7.5, over the substrate so that the firstmaterial covers the trench and the first and second conductors adjacentto the trench; depositing a second material, including metal, over thefirst material so that it covers the first material above the trench andthe first and second conductors adjacent to the trench; removing thesecond material; and while removing the second material, detecting thefirst material; and in response, terminating the step of removing thesecond material.
 2. A method of manufacturing a semiconductor device,according to claim 1, wherein the first material includes siliconnitride and wherein the temporary material separating the first andsecond conductors is a conductor.
 3. A method of manufacturing asemiconductor device, according to claim 1, further including exposingthe first and second conductors by planarizing an overlying surface. 4.A method of manufacturing a semiconductor device, according to claim 1,wherein further including patterning the first conductor and the secondconductor by laying conductive material in dielectric trenches and bysurface planarizing overlying conductive material.
 5. A method ofmanufacturing a semiconductor device, according to claim 1, wherein eachof the first and second conductors is a metal material, and furtherincluding using a Damascene process in which the first conductor and thesecond conductor are patterned by laying the metal material indielectric trenches and by CMP (chemical-mechanical polishing) overlyingmetal material.
 6. A method of manufacturing a semiconductor device,according to claim 5, wherein removing the temporary material includesselective etching.
 7. A method of manufacturing a semiconductor device,according to claim 1, wherein removing the second material includesselective etching.
 8. A method of manufacturing a semiconductor device,according to claim 1, wherein the first material is silicon nitride. 9.A method of manufacturing a semiconductor device, according to claim 8,wherein depositing silicon nitride over the substrate includes forming athin layer of silicon nitride over the trench and the first and secondconductors.
 10. A method of manufacturing a semiconductor device havinga capacitive structure, comprising: patterning a first conductor and asecond conductor by laying a conductive material with a dielectricseparating the first and second conductors; planarizing the conductivematerial to expose the first and second conductors; etching at least amajority of the dielectric that separates the first and secondconductors and forming a trench therebetween; depositing silicon nitrideover the substrate so that the silicon nitride covers the trench and thefirst and second conductors adjacent to the trench; depositing anothermaterial, including metal, over the silicon nitride so that the othermaterial covers the silicon nitride above the trench and the first andsecond conductors adjacent to the trench; etching away the othermaterial; and while removing the other material, detecting the siliconnitride; and in response, terminating the step of removing the othermaterial and forming a multi-terminal capacitor structure including atleast two terminals dielectrically separated by the silicon nitride. 11.A method of manufacturing a semiconductor device, according to claim 10,wherein planarizing conductive material to expose the first and secondconductors includes chemical-mechanical polishing.
 12. A method ofmanufacturing a semiconductor device, according to claim 11, wherein thedielectric separating the first and second conductors is an oxide.
 13. Amethod of manufacturing a semiconductor device, according to claim 12,wherein etching away the other material includes selective etching. 14.A method of manufacturing a semiconductor device, according to claim 13,wherein the silicon nitride has a dielectic constant of at least about7.5.
 15. A method of manufacturing a semiconductor device, according toclaim 14, wherein the dielectric separating the first and secondconductors has a dielectic constant of at least about 4.0.
 16. A methodof manufacturing a semiconductor device, according to claim 15, whereindepositing silicon nitride over the substrate includes forming a layerof silicon nitride over the trench and the first and second conductors,the layer of silicon nitride having a thickness of about 100 Angstroms.17. A method of manufacturing a semiconductor device, according to claim10, wherein forming a multi-terminal capacitor structure includesforming two terminals with the first and second conductors electricallyinterconnected to function as one of two terminals, and the othermaterial as the other of the two terminals.
 18. A method ofmanufacturing a semiconductor device, according to claim 10, whereinforming a multi-terminal capacitor structure includes forming threeterminals with the first and second conductors electrically isolated andfunctioning as two terminals, and with the other material as a commonterminal opposite each of the two terminals.
 19. A method ofmanufacturing a semiconductor device having a capacitive structure,comprising: providing a substrate having a first metal conductor and asecond metal conductor, the first and second metal conductors separatedby a dielectric and cross-coupled, each of the first and second metalconductors including first and second surface sides facing thedielectric; removing the dielectric that separates the first and secondmetal conductors and forming a trench therebetween; depositing a firstmaterial, having a dielectic constant at least about 7.5, over thesubstrate so that first material covers the trench and the first andsecond metal conductors adjacent to the trench; depositing a secondmaterial, including metal, over the first material so that the secondmaterial covers the first material above the trench and the first andsecond metal conductors adjacent to the trench; removing the secondmaterial; and while removing the second material, detecting the firstmaterial; and in response, terminating the step of removing the secondmaterial.
 20. A method of manufacturing a semiconductor device,according to claim 19, wherein the first and second metal conductorsfrom one terminal of a two-terminal capacitor structure, wherein theother material form the other of the two terminals, and wherein the twoterminals are dielectrically separated by the first material.
 21. Amethod of manufacturing a semiconductor device, according to claim 19,wherein the first material includes silicon nitride.
 22. A method ofmanufacturing a semiconductor device, according to claim 20, wherein thefirst material is silicon nitride and wherein removing the secondmaterial includes a selective etch process.